iLens interferometer probing micro-scale systems /
Tyagi, Ayush [MS15202]
iLens interferometer probing micro-scale systems / Ayush Tyagi. - IISER Mohali : Department of Physical Science , June 2020 - xvi, 58p. : ill.
Dr. Kamal P. Singh
xx.
Micro-scale Systems
iLens Interferometer Probing
micromachines
metrological
iLens interferometer probing micro-scale systems / Ayush Tyagi. - IISER Mohali : Department of Physical Science , June 2020 - xvi, 58p. : ill.
Dr. Kamal P. Singh
xx.
Micro-scale Systems
iLens Interferometer Probing
micromachines
metrological