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Resolution enhancement techniques in optical lithography/

Wong, Alfred Kwok-Kit.

Resolution enhancement techniques in optical lithography/ Alfred Kwok-Kit Wong. - Bellingham: SPIE Press, c2001. - 214 p.: ill.; - Tutorial texts in optical engineering ; v. TT 47 .

Includes bibliographical references and index.

ISBN: 0819439959 (softcover)

Subjects--Topical Terms:
Electronics
Integrated circuits
Microlithography.
Design and construction.

Dewey Class. No.: 621.381531 / WON-R

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