Resolution enhancement techniques in optical lithography/ Alfred Kwok-Kit Wong.

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Material type: Text

TextLanguage: Eng Series: Tutorial texts in optical engineering ; v. TT 47Publication details: Bellingham: SPIE Press, c2001.Description: 214 p.: illISBN:

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Item type	Current library	Call number	Status	Date due	Barcode
Books	IISER Central Library Third Floor - Right Wing	530.0724 WON-R (Browse shelf(Opens below))	Available		0002228

Includes bibliographical references and index.

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