Resolution enhancement techniques in optical lithography/ Alfred Kwok-Kit Wong.
Material type: TextLanguage: Eng Series: Tutorial texts in optical engineering ; v. TT 47Publication details: Bellingham: SPIE Press, c2001.Description: 214 p.: illISBN:- 0819439959 (softcover)
- 621.381531 22 WON-R
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530.03 LER-E Vol.1 Encyclopedia of physics/ | 530.03 LER-E Vol.2 Encyclopedia of physics/ | 530.0724 GAL-H How experiments end/ | 530.0724 WON-R Resolution enhancement techniques in optical lithography/ | 530.076 GNA-P 200 puzzling physics problems/ | 530.076 GNA-T 200 more puzzling physics problems with hints and solutions | 530.076 LIM-P Problems and solutions on mechanics |
Includes bibliographical references and index.
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